Microreflectance differencespectrometer based on a charge coupled device camera: surface distribution of polishing-related linear defected density in GaAs

L.F. Lastras-Martinez, R. Castro-Garcia, R.E. Balderas-Navarro, A. Lastras-Martinez
Applied Optics, Vol. 48, pp 5713-5717, 2009.


We describe a microreflectance difference (μRD) spectrometer based on a charge coupled device (CCD), in contrast to most common RD spectrometers that are based on a photomultiplier or a photodiode as a light detector. The advantage of our instrument over others is the possibility to isolate the RD spectrum of specific areas of the sample; thus topographic maps of the surface can be obtained. In our setup we have a maximum spatial resolution of approximately 2.50 μm×2.50 μm and a spectral range from 1.2 to 5.5 eV. To illustrate the performance of the spectrometer, we have measured strains in mechanically polished GaAs (001) single crystals.